JPH0230827B2 - - Google Patents

Info

Publication number
JPH0230827B2
JPH0230827B2 JP59160191A JP16019184A JPH0230827B2 JP H0230827 B2 JPH0230827 B2 JP H0230827B2 JP 59160191 A JP59160191 A JP 59160191A JP 16019184 A JP16019184 A JP 16019184A JP H0230827 B2 JPH0230827 B2 JP H0230827B2
Authority
JP
Japan
Prior art keywords
polishing
platen
carrier
polishing pad
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59160191A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6052267A (ja
Inventor
Oo Dei Roorensu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPX Technologies Inc
Original Assignee
General Signal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Signal Corp filed Critical General Signal Corp
Publication of JPS6052267A publication Critical patent/JPS6052267A/ja
Publication of JPH0230827B2 publication Critical patent/JPH0230827B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP59160191A 1983-08-29 1984-07-30 取り外し可能な磨き具 Granted JPS6052267A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US527255 1983-08-29
US06/527,255 US4527358A (en) 1983-08-29 1983-08-29 Removable polishing pad assembly

Publications (2)

Publication Number Publication Date
JPS6052267A JPS6052267A (ja) 1985-03-25
JPH0230827B2 true JPH0230827B2 (en]) 1990-07-10

Family

ID=24100741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59160191A Granted JPS6052267A (ja) 1983-08-29 1984-07-30 取り外し可能な磨き具

Country Status (3)

Country Link
US (1) US4527358A (en])
JP (1) JPS6052267A (en])
DE (1) DE3430359A1 (en])

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07328915A (ja) * 1994-06-03 1995-12-19 Ebara Corp ポリッシング装置
JP3418467B2 (ja) * 1994-10-19 2003-06-23 株式会社荏原製作所 ポリッシング装置
JPH08187656A (ja) * 1994-12-28 1996-07-23 Ebara Corp ポリッシング装置
JPH08252765A (ja) * 1995-03-16 1996-10-01 Fujitsu Ltd 研磨装置、研磨布搬送装置、研磨布貼付装置、及び研磨布
US5551136A (en) * 1995-04-12 1996-09-03 Advanced Micro Devices, Inc. Pad removal device
US5897424A (en) * 1995-07-10 1999-04-27 The United States Of America As Represented By The Secretary Of Commerce Renewable polishing lap
JP3611404B2 (ja) * 1996-06-21 2005-01-19 株式会社荏原製作所 ポリッシング装置
US6379221B1 (en) 1996-12-31 2002-04-30 Applied Materials, Inc. Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system
US6066030A (en) * 1999-03-04 2000-05-23 International Business Machines Corporation Electroetch and chemical mechanical polishing equipment
US6746311B1 (en) 2000-01-24 2004-06-08 3M Innovative Properties Company Polishing pad with release layer
US7727052B2 (en) * 2007-11-09 2010-06-01 Araca Incorporated Removable polishing pad for chemical mechanical polishing

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3201904A (en) * 1961-11-09 1965-08-24 Corning Glass Works Apparatus for finishing glass surfaces
US3174258A (en) * 1962-12-24 1965-03-23 American Felt Co Glass polishing tool
US3345785A (en) * 1964-12-07 1967-10-10 Warren N Riker Sanding disc assembly
DE2056971A1 (de) * 1970-11-19 1972-06-15 Triefus France Applic Ind Du D Vorrichtung zum Polieren von Werkstückoberflächen
US4081928A (en) * 1974-05-16 1978-04-04 Texas Instruments Incorporated Silicon slice carrier block and plug assembly
US4020600A (en) * 1976-08-13 1977-05-03 Spitfire Tool & Machine Co., Inc. Polishing fixture

Also Published As

Publication number Publication date
DE3430359C2 (en]) 1987-08-20
US4527358A (en) 1985-07-09
DE3430359A1 (de) 1985-03-07
JPS6052267A (ja) 1985-03-25

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